Lam Research Corporation은 미국, 중국, 한국, 대만, 일본, 동남아시아, 유럽 지역에서 집적 회로 제조에 사용되는 반도체 처리 장비를 설계, 제조, 판매, 보수 및 서비스합니다. 이 회사는 텅스텐 또는 몰리브덴 금속화 애플리케이션을 위한 ALTUS 시스템, 구리 배선 전환을 위한 SABRE 전기화학 증착 제품, 유전체 필름 솔루션을 위한 Striker 단일 웨이퍼 원자층 증착 제품, VECTOR 플라즈마 강화 화학 기상 증착(CVD) 제품을 제공합니다.
또한 Lam Research Corporation은 Akara, Argos, Prevos, Selis, Flex, Vantex, Kiyo, Syndion, Versys metal과 같은 다양한 식각 시스템을 제공하며, Coronus 베벨 클린 제품과 Da Vinci, DV-Prime, EOS, SP 시리즈 웨이퍼 클리닝 제품도 제공합니다. 이 외에도 Reliant 증착, 식각, 클린 제품, Sense.i 플랫폼 제품, 고객 서비스, 예비 부품 및 업그레이드를 제공합니다.
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Lam Research Corporation designs, manufactures, markets, refurbishes, and services semiconductor processing equipment used in the fabrication of integrated circuits in the United States, China, Korea, Taiwan, Japan, Southeast Asia, and Europe. The company offers ALTUS systems to deposit conformal or selective films for tungsten or molybdenum metallization applications; SABRE electrochemical deposition products for copper interconnect transition, which support copper damascene manufacturing; Striker single-wafer atomic layer deposition products for dielectric film solutions; and VECTOR plasma-enhanced chemical vapor deposition (CVD) products. It also provides Akara, a conductor etch system designed to enhance etch precision, selectivity, and defect control; Argos, Prevos, and Selis, which are selective etch systems used in the fabrication of advanced logic and memory devices that require precise control at nanoscale dimensions; Flex for dielectric etch applications; Vantex, a dielectric etch system that provides RF technology and repeatable wafer-to-wafer performance enabled by Equipment Intelligence solutions; Kiyo for conductor etch applications; Syndion for deep silicon etch; and Versys metal products for metal etch processes. In addition, the company offers Coronus bevel clean products to enhance die yield and Da Vinci, DV-Prime, EOS, and SP series products to address various wafer cleaning applications. Further, it provides Reliant deposition, etch, and clean products; Sense.i platform products; and customer service, spares, and upgrades. Lam Research Corporation was incorporated in 1980 and is headquartered in Fremont, California.